Titanium sputtering target

Origin: Baoji, Shaanxi, China Brand: FRL Metal Name: Titanium Splint Grade: Gr0, Gr1, Gr2, Gr5, Gr7, Gr12 Density: 4.51 g/cm³ Specifications: Customizable Standards: ASME B16.5, DIN, EN Production Process: Hot Rolling Surface Treatment: Polished/Sandblasted (as required) Certification: ISO9001 Delivery Time: 5-7 days Payment Method: Telegraphic Transfer (T/T) Packaging: Standard Packaging (as required)
Product Description

I. Commonly Used Titanium Sputtering Specimens (Pure Titanium)

• Gr0 Ti ≥99.99% (4N)
Applications: High-purity sputtering, optics, semiconductors, high-end displays

• Gr1 Ti ≥99.9% (3N9)
Applications: Photovoltaics, displays, lithium batteries, medical coatings, general electronics

• Gr2 Ti ≥99.8% (3N8)
Applications: Decorative coatings, tool wear resistance, hardware PVD, general coatings

• Gr3 Ti ≥99.7% (3N7)
Applications: Industrial wear resistance, structural component coatings, applications with less stringent requirements

• Gr7 (Ti-0.2Pd) Corrosion-resistant titanium alloy, strong resistance to chloride ions and strong acids
Applications: Chemical industry, seawater, fuel cells, electrode coatings

• Gr12 (Ti-0.3Mo-0.8Ni) Medium corrosion resistance, higher cost-effectiveness
Applications: Chemical equipment, anti-corrosion coatings, seawater environments

II. American Standard ASTM Corresponding (most commonly used in the target material industry)

• GR1 ≈ TA1

• GR2 ≈ TA2

• GR3 ≈ TA3

• GR7 ≈ TA9

• GR12 ≈ TA10

• GR5 ≈ TC4 (Ti-6Al-4V)
III. Titanium Alloy Targets (National Standard)

• Gr5 (Ti-6Al-4V) Most commonly used alloy target. Applications: Aerospace, medical implants, high-strength hard coatings

• Gr5 ELI Ultra-low gap medical grade. Applications: High-end medical implant coatings
IV. High-purity Titanium Targets (Industry common name, not a national standard grade)

• Ti 4N5 (99.995%)

• Ti 5N (99.999%)

• Ti 6N (99.9999%)
Applications: Advanced semiconductor processes, chip blocking layers, OLEDs, optics

V. Commonly Used Alloy Targets (Sputtering Dedicated)

• Ti-W

• Ti-Ta

• Ti-Al

• Ti-Si

• Ti-Nb

• Ti-Pd
Applications: Semiconductors, optoelectronic devices, corrosion resistance, hard masks, electrodes

VI. Simplest Procurement Guide (Memorize This)

• General Decoration/Hardware: TA2 / GR2

• Photovoltaics/Displays/Lithium Batteries: TA1 / GR1

• Semiconductors/Optics: TA0 / 4N / 5N

• Medical Implants: TC4 ELI

• Highly Corrosive Environments: TA9 / GR7, TA10 / GR12

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Titanium sputtering targets (pure titanium/titanium alloy, for PVD sputtering) rely on high purity, density, and uniform film formation, covering seven major fields: semiconductors, displays, new energy, optics, medical, decorative, and aerospace. Below are some precise applications:

🔌 Semiconductors (Highest end, purity 4N5–6N)

• Barrier layer/adhesion layer: Ti/TiN is used as a copper wiring barrier to prevent Cu diffusion into Si; essential for advanced processes.

• Contact holes/metallization: Ti/Al/TiN stacking improves conductivity and adhesion.

• Hard mask/passivation: TiN is used as an etching mask, high temperature resistance, high precision.

📺 Display panels (Large size, G8.5–G10.5)

• LCD: Transparent electrode/gate line/data line underlayment to improve ITO adhesion.

• OLED: Anode adhesion layer, pixel isolation, reflective layer (TiN).

• Mini/Micro LED: Reflective layer, electrode leads, high uniformity, low defect rate.

☀️ New Energy (Photovoltaics/Lithium Batteries/Fuel Cells)

• Photovoltaics: PERC back-reflective coating (TiN), perovskite electron transport layer (TiO₂), TCO layer

• Lithium Batteries: Nano-Ti layer on copper foil surface, anti-oxidation, improved interface stability, increased cycle life

• Fuel Cells: Bipolar plate Ti/TiN coating, reduced contact resistance, corrosion prevention

🔭 Optical Coatings (Precision Optics/Consumer Electronics)

• Mobile Phone/VR/Camera Lenses: Anti-reflective/high-reflective coating (Ti/TiO₂/TiN), transmittance >99.5%

• Laser/Astronomical Telescopes: High-hardness, anti-fouling, temperature-resistant optical coating

• Eyeglass Lenses: Abrasion-resistant, fingerprint-resistant, UV-resistant composite coating

🏥 Medical (Biocompatible, Medical Grade)

• Orthopedic Implants: Artificial joint/bone screw surface Ti/TiO₂ coating, promotes osseointegration, prevents rejection

• Dentistry: Implant coating, improves bone integration strength

• Interventional Devices: Surface modification of stents/guidewires, anticoagulant, corrosion resistant

✨ Decorative and Industrial Wear Resistance (Mainstream PVD)

• Consumer Electronics: Mobile phone frames/buttons/camera bezels (gold/gunmetal/black TiN/TiC)

• Watches/Jewelry: Wear-resistant, non-fading, hypoallergenic plating

• Hardware/Automotive: Cutting tools/molds/bearings TiN/TiC hard films, increasing hardness by 3–5 times

✈️ Aerospace (High Temperature/High Strength/Lightweight)

• Engines: Blades/combustion chamber TiAl coating, high temperature resistance, oxidation resistance

• Structural Components: Surface strengthening, weight reduction + fatigue resistance + corrosion resistance

• Satellites/Spacecraft: Antennas/thermal control/protective films, resistant to space environment

Other Industries

• Chemicals/Seawater: Anti-corrosion electrode/filter coating, resistant to strong acid chloride ions

Contact Us

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Email: lucky@bjfreelong.com

WhatsApp: +13369210303

Please contact us for detailed quotations and technical specifications. We look forward to becoming your trusted high-end titanium materials partner.

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