I. Commonly Used Titanium Sputtering Specimens (Pure Titanium)
• Gr0 Ti ≥99.99% (4N)
Applications: High-purity sputtering, optics, semiconductors, high-end displays
• Gr1 Ti ≥99.9% (3N9)
Applications: Photovoltaics, displays, lithium batteries, medical coatings, general electronics
• Gr2 Ti ≥99.8% (3N8)
Applications: Decorative coatings, tool wear resistance, hardware PVD, general coatings
• Gr3 Ti ≥99.7% (3N7)
Applications: Industrial wear resistance, structural component coatings, applications with less stringent requirements
• Gr7 (Ti-0.2Pd) Corrosion-resistant titanium alloy, strong resistance to chloride ions and strong acids
Applications: Chemical industry, seawater, fuel cells, electrode coatings
• Gr12 (Ti-0.3Mo-0.8Ni) Medium corrosion resistance, higher cost-effectiveness
Applications: Chemical equipment, anti-corrosion coatings, seawater environments
II. American Standard ASTM Corresponding (most commonly used in the target material industry)
• GR1 ≈ TA1
• GR2 ≈ TA2
• GR3 ≈ TA3
• GR7 ≈ TA9
• GR12 ≈ TA10
• GR5 ≈ TC4 (Ti-6Al-4V)
III. Titanium Alloy Targets (National Standard)
• Gr5 (Ti-6Al-4V) Most commonly used alloy target. Applications: Aerospace, medical implants, high-strength hard coatings
• Gr5 ELI Ultra-low gap medical grade. Applications: High-end medical implant coatings
IV. High-purity Titanium Targets (Industry common name, not a national standard grade)
• Ti 4N5 (99.995%)
• Ti 5N (99.999%)
• Ti 6N (99.9999%)
Applications: Advanced semiconductor processes, chip blocking layers, OLEDs, optics
V. Commonly Used Alloy Targets (Sputtering Dedicated)
• Ti-W
• Ti-Ta
• Ti-Al
• Ti-Si
• Ti-Nb
• Ti-Pd
Applications: Semiconductors, optoelectronic devices, corrosion resistance, hard masks, electrodes
VI. Simplest Procurement Guide (Memorize This)
• General Decoration/Hardware: TA2 / GR2
• Photovoltaics/Displays/Lithium Batteries: TA1 / GR1
• Semiconductors/Optics: TA0 / 4N / 5N
• Medical Implants: TC4 ELI
• Highly Corrosive Environments: TA9 / GR7, TA10 / GR12
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Titanium sputtering targets (pure titanium/titanium alloy, for PVD sputtering) rely on high purity, density, and uniform film formation, covering seven major fields: semiconductors, displays, new energy, optics, medical, decorative, and aerospace. Below are some precise applications:
🔌 Semiconductors (Highest end, purity 4N5–6N)
• Barrier layer/adhesion layer: Ti/TiN is used as a copper wiring barrier to prevent Cu diffusion into Si; essential for advanced processes.
• Contact holes/metallization: Ti/Al/TiN stacking improves conductivity and adhesion.
• Hard mask/passivation: TiN is used as an etching mask, high temperature resistance, high precision.
📺 Display panels (Large size, G8.5–G10.5)
• LCD: Transparent electrode/gate line/data line underlayment to improve ITO adhesion.
• OLED: Anode adhesion layer, pixel isolation, reflective layer (TiN).
• Mini/Micro LED: Reflective layer, electrode leads, high uniformity, low defect rate.
☀️ New Energy (Photovoltaics/Lithium Batteries/Fuel Cells)
• Photovoltaics: PERC back-reflective coating (TiN), perovskite electron transport layer (TiO₂), TCO layer
• Lithium Batteries: Nano-Ti layer on copper foil surface, anti-oxidation, improved interface stability, increased cycle life
• Fuel Cells: Bipolar plate Ti/TiN coating, reduced contact resistance, corrosion prevention
🔭 Optical Coatings (Precision Optics/Consumer Electronics)
• Mobile Phone/VR/Camera Lenses: Anti-reflective/high-reflective coating (Ti/TiO₂/TiN), transmittance >99.5%
• Laser/Astronomical Telescopes: High-hardness, anti-fouling, temperature-resistant optical coating
• Eyeglass Lenses: Abrasion-resistant, fingerprint-resistant, UV-resistant composite coating
🏥 Medical (Biocompatible, Medical Grade)
• Orthopedic Implants: Artificial joint/bone screw surface Ti/TiO₂ coating, promotes osseointegration, prevents rejection
• Dentistry: Implant coating, improves bone integration strength
• Interventional Devices: Surface modification of stents/guidewires, anticoagulant, corrosion resistant
✨ Decorative and Industrial Wear Resistance (Mainstream PVD)
• Consumer Electronics: Mobile phone frames/buttons/camera bezels (gold/gunmetal/black TiN/TiC)
• Watches/Jewelry: Wear-resistant, non-fading, hypoallergenic plating
• Hardware/Automotive: Cutting tools/molds/bearings TiN/TiC hard films, increasing hardness by 3–5 times
✈️ Aerospace (High Temperature/High Strength/Lightweight)
• Engines: Blades/combustion chamber TiAl coating, high temperature resistance, oxidation resistance
• Structural Components: Surface strengthening, weight reduction + fatigue resistance + corrosion resistance
• Satellites/Spacecraft: Antennas/thermal control/protective films, resistant to space environment
Other Industries
• Chemicals/Seawater: Anti-corrosion electrode/filter coating, resistant to strong acid chloride ions
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