sputtering zirconium target

Sputtered zirconium targets are high-purity zirconium or zirconium alloy blanks used in magnetron sputtering/vacuum coating (PVD). They are bombarded with argon ions under vacuum to sputter Zr atoms and form uniform and dense thin films of Zr, ZrN, ZrO₂, etc. on the surface of the workpiece. They are core coating materials in the fields of semiconductors, optics, decoration, and new energy.

Key Characteristics:

High Melting Point: 1855℃, stable at high temperatures and resistant to cracking.

Strong Corrosion Resistance: Resistant to acids, alkalis, seawater, and high-temperature oxidation; suitable for anti-corrosion/wear-resistant coatings.

High Dielectric Constant: ZrO₂ (~25) is used in high-k dielectric layers, a key material in advanced semiconductor processes.

Density: 6.51 g/cm³ (pure zirconium).

Purity: Electronic grade **≥99.95% (3N5), high-end 99.99% (4N)**, 99.999% (5N).

II. Main Applications

1) Semiconductor Chips (Core High-End)

Cu Interconnect Barrier Layer: For 90nm and below processes, Zr/Ta stacking prevents copper diffusion and reduces leakage current (CPU/Memory Chips).

High-k Dielectric Layer: ZrO₂ replaces SiO₂, improving capacitor/gate insulation performance (DRAM/Advanced Logic Chips).

Contact Layer/Passivation Layer: Improves device stability and reliability.

2) Optical Coatings (Cameras/Displays/Glass)

ZrO₂ Antireflective Coating/High-Reflectivity Coating: Refractive index ~2.1 (550nm), camera lenses, AR/VR glass, displays, optical filters.

Infrared/Ultraviolet Coating: Low absorption, high uniformity, optical communication/night vision equipment.

3) Decorative and Hard Coatings (High-End Consumer Goods/Hardware)

Zirconium Nitride (ZrN, gold): Replaces gold plating; used in high-end watches, bathroom hardware, mobile phone frames, and knives; offers wear resistance, corrosion resistance, and aesthetic appeal.

Zirconium Carbide (ZrC): An ultra-hard coating used in molds, bearings, and cutting tools; extends lifespan.

4) New Energy (Batteries/Electrolysis/Photovoltaics)

Solid-State Battery Electrolyte: Deposition of **LLZO (Lanium Lithium Zirconate)** thin film to improve ionic conductivity.

PEM Electrolytic Cell Anti-Corrosion Coating: Resistant to strong acids/high potentials, extending equipment lifespan.

Photovoltaic Glass Anti-Reflective Film: Improves light transmittance and increases power generation.

5) Biomedical (Implants)

Orthopedic/Dental Implant Coating: ZrO₂ gradient film enhances osseointegration, corrosion resistance, and biocompatibility (artificial joints/dental implants).

6) Other Applications

Superconducting buffer layer: YSZ (yttrium-stabilized zirconium oxide) is used in high-temperature superconducting tapes (YBCO) for lattice-matched induced epitaxial growth.

Nuclear industry: Low neutron absorption cross section, fuel cladding/structural component coating.

Quality Control and Testing

Each product undergoes rigorous inspection before shipment:

Dimensional Inspection: Precise measurement of thickness, length, and width

Chemical Composition and Mechanical Property Analysis: Third-party testing reports

Surface Inspection: Visual and microscopic inspection for defects

Ultrasonic Testing: Detection of internal defects

Why Choose Us

Technology and Quality: Located in Baoji, China's Titanium Valley, we possess professional production technology and extensive experience in non-ferrous metal manufacturing.

Global Coverage: We provide consistently high-quality products to customers in Australia, South Korea, Germany, the USA, the UK, Malaysia, and the Middle East.

Quality Commitment: We never compromise on quality and are responsible for every product we manufacture.

Technical Support: We have professional personnel overseeing the entire process from raw materials to finished products!

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Contact Us

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Email: lucky@bjfreelong.com

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Please contact us for detailed quotations and technical specifications. We look forward to becoming your trusted high-end titanium materials partner.